사업분야
People Smile Dream
Part /
Utility Hook-up
System Configuration | Process Chamber, Gas Box, ICP Source, RF Bias |
---|---|
Application | BOEL 3D Package Descum & Treatment |
Feature | Low Damage & Excellent Uniformity |
System Configuration | Process Chamber, Gas Box, ICP Source, RF Bias |
---|---|
Application | BOEL 3D Package Descum & Treatment |
Feature | Low Damage & Excellent Uniformity |